The University of Sheffield
Department of Materials Science and Engineering

List of Equipment and Facilities in the Sorby Centre

Transmission Electron Microscopes
JEOL JEM 3010 UHR TEM Ultra-high resolution machine with a point resolution of 0.17nm at 300kV, probe of 1nm diameter for microanalysis and electron diffraction. Pentafet UTW EDS detector and ISIS 300 processing unit for microanalysis of elements starting from B. High Resolution Slow-Scan CCD Camera for digital image acquisition.
FEI Tecnai 20 TEM 200 kV, fully computerised TEM, 0.24nm resolution and probe size down to 1nm in diameter. Computerised goniometer "CompuStage" allows easy and accurate specimen position control. Fully embedded EDAX EDS system can be used for qualitative and quantitative microanalysis. Digital CCD Camera for high-quality image recording.
Phillips EM 420 T Maximum 120 kV transmission electron microscope with resolution approaching 0.34 nm. For microanalysis and micro-diffraction, probes of 2nm in diameter can be obtained. 420T (D) has ATW-2 EDS detector and eXL processing unit which can also be used to analyse elements starting from Na.
Phillips EM 430 300kV transmission electron microscope. Twin lens configuration for very high tilt. HREM image capability with lattice resolution down to below 0.2nm. Heating stage. EDX-system and TV-rate digital recording are planned to be installed in the near future.

Scanning Electron Microscopes
FEI Sirion FEG SEM FEI Sirion Field Emission Gun scanning electron micrscope (FEGSEM) with electron backscattered diffraction (EBSD). The Sirion has a unique in-lens detection system that allows ultra-high resolution imaging in both secondary and back-scattered modes at voltages down to 500V.
Phillips PSEM 500 SEM Fully motorised stage and 10 nm resolution in SE mode. Secondary electron (SE) detector, backscattered electron (BSE) detector. Be window EDS unit for qualitative and quantitative microanalysis of elements from sodium to uranium and X-ray dot mapping. Maximum specimen size, 35 mm diameter by 25 mm high. PC based I-scan image grabber allows digital image acquisition and storage on CDRW.
JEOL JSM 6400 SEM 3.5nm resolution in SE mode. Some microscope functions computer controlled. Images can be acquired using SE and BSE detectors. This microscope can be also used to evaluate the orientation of bulk samples using EBSD system from HKL Technology. Turreted Pentafet detector and ISIS 300 processing unit for EDS analysis of elements starting from Na. Maximum specimen size: 32 mm diameter, 20 mm high. Digital images can be recorded using I-Scan image acquisition system and stored on CDRW.
Camscan Mk 2 SEM X and Y motorised stage, 7nm resolution in SE mode, SE, BSE and SC detectors. AN10/85 EDS system with Be window detector for qualitative and quantitative microanalysis and for X-ray mapping. Manually controlled WDS spectrometer, particularly for light element analysis. Relatively large specimens can be accommodated by prior arrangement. Images in digital form can be recorded using I-Scan image acquisition system and stored on CDRW.

Electron Microprobe
CAMECA SX-51 Electron Microprobe Detection of characteristic x-rays of elements based on wavelength dispersion. The microprobe is fitted with four wavelength dispersive spectrometers. It is capable of qualitative and quantitative analysis of elements from Be to U, to a detection limit of 100 – 500 ppm. Accelerating voltage up to 50 kV, beam current up to 200 nanoamps. The probe can perform automated line scans and elemental maps. Sample size: 25 mm diameter, 20 mm tall.

Preparation Equipment
Various Preparation Equipment Gatan Duo Mill Ion Beam Milling Equipment (IBM) (X2)
Gatan Precision Ion Polisher (PIPS)
Dimpler
Emitech C evaporation unit
Gold Sputter unit
Various polishing and cutting equipment