Studies of Nanostructured Materials
Nanoscale semiconductor structures in a range of alloy systems are being assessed in detail by use of FEGTEM analytical methods. A particular focus is upon the SiGe/Si system where quantum well arrays are being produced by advanced chemical vapour deposition.
The principal applications are for the fabrication of infrared detectors and terahertz emitters and it is essential that layer compositions and periodicities are controlled with tight tolerances. The structural measurements allow theoretical modelling of device performance to be carried out with confidence.