@article{article, title  = {{Surface profile measurement techniques for large aperture optical thin film membrane structures}},

 publisher = {{Elsevier}},

 url = {{}},

 year = {{2013}},

 month = {{10}},

 author = {{Spradley KD and Gregory DA and Outerbridge GJ}},

 doi = {{10.1016/j.optlastec.2013.03.018}},

 volume = {{51}},

 journal = {{Optics & Laser Technology}},

 pages = {{47-54}},

 note = {{Accessed on 2026/02/04}}}