TY - JOUR T1 - Surface profile measurement techniques for large aperture optical thin film membrane structures JO - Optics & Laser Technology PY - 2013/10/01 AU - Spradley KD AU - Gregory DA AU - Outerbridge GJ ED - DO - DOI: 10.1016/j.optlastec.2013.03.018 PB - Elsevier VL - 51 SP - 47 EP - 54 Y2 - 2026/02/04 ER -