TY - DATA T1 - Tribochemical Nanolithography: Selective Mechanochemical Removal of Photocleavable Nitrophenyl Protecting Groups with 23 nm Resolution at Speeds of up to 1 mm s­¬–1 PY - -0001/11/30 AU - Leggett G ED - DO - DOI: 10.15131/shef.data.21842718 Y2 - 2026/06/05 ER -