@inproceedings{inproceedings, title  = {{Dry etching and surface passivation techniques for type-II InAs/GaSb superlattice infrared detectors}},

 url = {{}},

 year = {{2010}},

 month = {{10}},

 author = {{Tan SL and Goh YL and Das SD and Zhang S and Tan CH and David JPR and Gautam N and Kim H and Plis E and Krishna S}},

 doi = {{10.1117/12.864787}},

 volume = {{7838}},

 journal = {{Proceedings of SPIE the International Society for Optical Engineering}},

 note = {{Accessed on 2025/11/19}}}