TY - CONF T1 - Electron energy loss spectroscopic profiling of semiconductor hetero- and nano-structures: theory, implementation, applications JO - MICROSCOPY OF SEMICONDUCTING MATERIALS 2003 PY - 2018/01/01 AU - Walther T ED - Cullis AG ED - Midgley PA IS - 180 SP - 27 EP - 32 Y2 - 2025/12/01 ER -