@article{article, title  = {{The Effect of Surface States on Secondary Electron (SE) Dopant Contrast from Silicon p-n Junctions}},

 publisher = {{Springer Science and Business Media LLC}},

 url = {{https://doi.org/10.1557/proc-1026-c04-02 }},

 year = {{2011}},

 month = {{2}},

 author = {{Chee AKW and Rodenburg C and Humphreys CJ}},

 doi = {{10.1557/proc-1026-c04-02}},

 volume = {{1026}},

 journal = {{MRS Proceedings}},

 note = {{Accessed on 2025/11/03}}}