TY  - JOUR

T1  - The Effect of Surface States on Secondary Electron (SE) Dopant Contrast from Silicon p-n Junctions

JO  - MRS Proceedings

UR  - https://doi.org/10.1557/proc-1026-c04-02

PY  - 2011/02/01

AU  - Chee AKW

AU  - Rodenburg C

AU  - Humphreys CJ

ED  - 

DO  - DOI: 10.1557/proc-1026-c04-02

PB  - Springer Science and Business Media LLC

VL  - 1026

Y2  - 2025/11/03

ER  -