@inproceedings{inproceedings, title = {{In-situ TEM mechanical testing of a Si MEMS nanobridge}}, url = {{}}, year = {{2008}}, month = {{1}}, author = {{Lockwood AJ and Bunyan RJT and Inkson BJ}}, volume = {{6}}, issue = {{2}}, pages = {{495}}, note = {{Accessed on 2026/07/22}}}