TY  - CONF

T1  - In-situ TEM mechanical testing of a Si MEMS nanobridge

PY  - 2008/01/01

AU  - Lockwood AJ

AU  - Bunyan RJT

AU  - Inkson BJ

ED  - 

VL  - 6

IS  - 2

SP  - 495

Y2  - 2026/07/22

ER  -