@article{article, title  = {{Comparison of different X‐ray‐based scanning electron microscopy methods to detect sub‐nanometre ultra‐thin InAs layers deposited on top of GaAs}},

 publisher = {{Wiley}},

 url = {{https://doi.org/10.1111/jmi.70049 }},

 year = {{2025}},

 month = {{11}},

 author = {{Walther T and Creasey‐Gray S and Boehm S and Young H and Yang Y}},

 doi = {{10.1111/jmi.70049}},

 journal = {{Journal of Microscopy}},

 note = {{Accessed on 2025/11/29}}}