@article{article, title  = {{Nanoscale deformation of MEMS materials}},

 url = {{}},

 year = {{2011}},

 month = {{3}},

 author = {{Lockwood AJ and Padmanabhan A and Bunyan RJT and Inkson BJ}},

 issue = {{1297}},

 pages = {{07-09}},

 note = {{Accessed on 2026/07/22}}}