TY  - JOUR

T1  - Nanoscale deformation of MEMS materials

PY  - 2011/03/24

AU  - Lockwood AJ

AU  - Padmanabhan A

AU  - Bunyan RJT

AU  - Inkson BJ

ED  - 

IS  - 1297

SP  - 07

EP  - 09

Y2  - 2026/07/22

ER  -