TY - JOUR T1 - Bidirectional reflectance distribution function measurement of molecular contaminants in the ultraviolet, vacuum ultraviolet, and visible ranges JO - Optical Engineering PY - 2007/11/01 AU - Herren KA AU - Gregory DA ED - DO - DOI: 10.1117/1.2802140 PB - SPIE, the international society for optics and photonics VL - 46 IS - 11 SP - 113601 EP - 113601 Y2 - 2026/02/04 ER -