TY  - JOUR

T1  - Overcoming material challenges for replication of “motheye lenses” using step and flash imprint lithography for optoelectronic applications

JO  - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

UR  - https://doi.org/10.1116/1.2981081

PY  - 2008/10/02

AU  - Kettle J

AU  - Hoyle RT

AU  - Perks RM

AU  - Dimov S

ED  - 

DO  - DOI: 10.1116/1.2981081

PB  - American Vacuum Society

VL  - 26

IS  - 5

SP  - 1794

EP  - 1799

Y2  - 2026/09/13

ER  -