@article{article, title = {{Fabrication of a novel SEM microgripper by electrochemical and FIB techniques}}, url = {{}}, year = {{2009}}, month = {{12}}, author = {{Briston KJ and Cullis AG and Inkson BJ}}, doi = {{10.1088/0960-1317/20/1/015028}}, volume = {{20}}, journal = {{J MICROMECH MICROENG}}, issue = {{1}}, note = {{Accessed on 2026/07/22}}}