TY  - JOUR

T1  - Fabrication of a novel SEM microgripper by electrochemical and FIB techniques

JO  - J MICROMECH MICROENG

PY  - 2009/12/08

AU  - Briston KJ

AU  - Cullis AG

AU  - Inkson BJ

ED  - 

DO  - DOI: 10.1088/0960-1317/20/1/015028

VL  - 20

IS  - 1

Y2  - 2026/07/22

ER  -