@misc{misc, title  = {{In-Situ Full-Wafer Metrology Via Coupled White Light and Monochromatic Stroboscopic Illumination}},

 url = {{https://doi.org/10.2139/ssrn.4782503 }},

 year = {{2024}},

 month = {{1}},

 author = {{Atkinson JBP and Howse J}},

 doi = {{10.2139/ssrn.4782503}},

 note = {{Accessed on 2026/11/12}}}