@article{article, title  = {{Measurement of nanometre-scale gate oxide thicknesses by energy-dispersive X-ray spectroscopy in a scanning electron microscope combined with Monte Carlo simulations}},

 publisher = {{MDPI AG}},

 url = {{https://eprints.whiterose.ac.uk/id/eprint/177293 https://www.mdpi.com/2079-4991/11/8/2117 }},

 year = {{2021}},

 month = {{8}},

 author = {{Walther T}},

 doi = {{10.3390/nano11082117}},

 volume = {{11}},

 journal = {{Nanomaterials}},

 issue = {{8}},

 note = {{Accessed on 2025/12/01}}}