TY  - JOUR

T1  - Measurement of nanometre-scale gate oxide thicknesses by energy-dispersive X-ray spectroscopy in a scanning electron microscope combined with Monte Carlo simulations

JO  - Nanomaterials

UR  - https://eprints.whiterose.ac.uk/id/eprint/177293

UR  - https://www.mdpi.com/2079-4991/11/8/2117

PY  - 2021/08/20

AU  - Walther T

ED  - 

DO  - DOI: 10.3390/nano11082117

PB  - MDPI AG

VL  - 11

IS  - 8

Y2  - 2025/12/01

ER  -