TY - CONF T1 - The dependence of the growth rate of LPCVD grown SiGe quantum wells on the Ge composition and the layer thickness CY - Brussels PY - 1996/01/01 AU - Walther T AU - Boothroyd CB AU - Humphreys CJ ED - PB - The Committee of European Societies of Microscopy VL - 1 SP - 317 EP - 318 Y2 - 2025/12/01 ER -