TY - JOUR T1 - Quantification of series of X-ray spectra taken at different tilts in analytical transmission electron microscopy JO - 17TH INTERNATIONAL CONFERENCE ON MICROSCOPY OF SEMICONDUCTING MATERIALS 2011 PY - 2011/11/09 AU - Parri MC AU - Walther T ED - DO - DOI: 10.1088/1742-6596/326/1/012037 VL - 326 Y2 - 2025/12/01 ER -