@inproceedings{inproceedings, title  = {{Patterning of nanomembranes with a focused-ion-beam}},

 publisher = {{IEEE}},

 url = {{https://doi.org/10.1109/icmel.2008.4559233 }},

 year = {{2008}},

 month = {{5}},

 author = {{Matovic J and Kettle J and Brousseau E and Adamovic N}},

 doi = {{10.1109/icmel.2008.4559233}},

 journal = {{2008 26th International Conference on Microelectronics}},

 pages = {{103-106}},

 note = {{Accessed on 2026/09/13}}}