TY  - CONF

T1  - Patterning of nanomembranes with a focused-ion-beam

JO  - 2008 26th International Conference on Microelectronics

UR  - https://doi.org/10.1109/icmel.2008.4559233

PY  - 2008/05/01

AU  - Matovic J

AU  - Kettle J

AU  - Brousseau E

AU  - Adamovic N

ED  - 

DO  - DOI: 10.1109/icmel.2008.4559233

PB  - IEEE

SP  - 103

EP  - 106

Y2  - 2026/09/13

ER  -