@inproceedings{inproceedings, title  = {{Spectroscopic ellipsometry-based scatterometry for depth and line width measurements of polysilicon-filled deep trenches}},

 url = {{}},

 year = {{2004}},

 month = {{5}},

 author = {{Hingst T and Moert M and Reinig P and Backen E and Dost R and Weidner P and Hopkins J and Dziura T and Elazami A and Freed R}},

 doi = {{10.1117/12.535646}},

 volume = {{5375}},

 journal = {{METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVIII, PTS 1 AND 2}},

 pages = {{587-596}},

 note = {{Accessed on 2026/07/14}}}