@inproceedings{inproceedings, title  = {{Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)}},

 publisher = {{Elsevier BV}},

 url = {{https://doi.org/10.1016/j.mee.2007.12.003 }},

 year = {{2008}},

 month = {{5}},

 author = {{Kettle J and Hoyle RT and Dimov S and Perks RM}},

 doi = {{10.1016/j.mee.2007.12.003}},

 volume = {{85}},

 journal = {{Microelectronic Engineering}},

 issue = {{5-6}},

 pages = {{853-855}},

 note = {{Accessed on 2026/09/13}}}