@article{article, title  = {{Deformation behaviour of polysilicon components for MEMS}},

 url = {{}},

 year = {{2012}},

 month = {{8}},

 author = {{Lockwood AJ and Padmanabhan A and Bunyan RJT and Inkson BJ}},

 doi = {{10.1088/0960-1317/22/10/105016}},

 volume = {{22}},

 journal = {{Journal of Micromechanics and Microengineering}},

 issue = {{10}},

 note = {{Accessed on 2026/07/21}}}