TY  - JOUR

T1  - Deformation behaviour of polysilicon components for MEMS

JO  - Journal of Micromechanics and Microengineering

PY  - 2012/08/28

AU  - Lockwood AJ

AU  - Padmanabhan A

AU  - Bunyan RJT

AU  - Inkson BJ

ED  - 

DO  - DOI: 10.1088/0960-1317/22/10/105016

VL  - 22

IS  - 10

Y2  - 2026/07/21

ER  -