@inproceedings{inproceedings, title = {{Structure sensitive hydrogenation effects in polysilicon high voltage thin film transistors}}, url = {{}}, year = {{2011}}, month = {{2}}, author = {{Clough FJ and Xu YZ and Narayanan EMS and Cross R}}, doi = {{10.1557/proc-557-635}}, volume = {{557}}, journal = {{Materials Research Society Symposium Proceedings}}, pages = {{635-640}}, note = {{Accessed on 2025/11/24}}}