@article{article, title = {{Ion Milling of Sapphire}}, publisher = {{The Electrochemical Society}}, url = {{https://doi.org/10.1149/1.1979208 }}, year = {{2005}}, month = {{7}}, author = {{Gregory DA and Herren KA}}, doi = {{10.1149/1.1979208}}, volume = {{152}}, journal = {{Journal of The Electrochemical Society}}, issue = {{9}}, pages = {{J117-J117}}, note = {{Accessed on 2026/02/04}}}