TY  - JOUR

T1  - Ion Milling of Sapphire

JO  - Journal of The Electrochemical Society

UR  - https://doi.org/10.1149/1.1979208

PY  - 2005/07/21

AU  - Gregory DA

AU  - Herren KA

ED  - 

DO  - DOI: 10.1149/1.1979208

PB  - The Electrochemical Society

VL  - 152

IS  - 9

SP  - J117

EP  - J117

Y2  - 2026/02/04

ER  -