@article{article, title = {{A comparison of He and Ne FIB imaging of cracks in microindented silicon nitride}}, publisher = {{Elsevier}}, url = {{https://eprints.whiterose.ac.uk/id/eprint/131350 https://doi.org/10.1016/j.matchar.2018.05.006 }}, year = {{2018}}, month = {{7}}, author = {{Baggott A and Mazaheri M and Zhou Y and Zhang H and Inkson BJ}}, doi = {{10.1016/j.matchar.2018.05.006}}, volume = {{141}}, journal = {{Materials Characterization}}, pages = {{362-369}}, note = {{Accessed on 2026/07/21}}}