@inproceedings{inproceedings, title = {{A new double epitaxial layer dielectric isolation technology for HVICs}}, publisher = {{IEEE}}, url = {{https://doi.org/10.1109/ispsd.1993.297114 }}, year = {{1993}}, month = {{1}}, author = {{Narayanan EMS and Amaratunga G and Milne WI}}, doi = {{10.1109/ispsd.1993.297114}}, journal = {{[1993] Proceedings of the 5th International Symposium on Power Semiconductor Devices and ICs}}, pages = {{113-118}}, note = {{Accessed on 2025/11/24}}}