TY  - CONF

T1  - A new double epitaxial layer dielectric isolation technology for HVICs

JO  - [1993] Proceedings of the 5th International Symposium on Power Semiconductor Devices and ICs

UR  - https://doi.org/10.1109/ispsd.1993.297114

PY  - 1993/01/01

AU  - Narayanan EMS

AU  - Amaratunga G

AU  - Milne WI

ED  - 

DO  - DOI: 10.1109/ispsd.1993.297114

PB  - IEEE

SP  - 113

EP  - 118

Y2  - 2025/11/24

ER  -