@article{article, title  = {{Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance}},

 publisher = {{Springer Science and Business Media LLC}},

 url = {{https://eprints.whiterose.ac.uk/id/eprint/234471 }},

 year = {{2025}},

 month = {{11}},

 author = {{Sánchez-Arriaga NE and Canzini E and Espley-Plumb NJ and Farnsworth M and Pope S and Leyland A and Tiwari A}},

 doi = {{10.1038/s41598-025-23640-5}},

 volume = {{15}},

 journal = {{Scientific Reports}},

 issue = {{1}},

 note = {{Accessed on 2025/12/03}}}