TY  - JOUR

T1  - Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance

JO  - Scientific Reports

UR  - https://eprints.whiterose.ac.uk/id/eprint/234471

PY  - 2025/11/12

AU  - Sánchez-Arriaga NE

AU  - Canzini E

AU  - Espley-Plumb NJ

AU  - Farnsworth M

AU  - Pope S

AU  - Leyland A

AU  - Tiwari A

ED  - 

DO  - DOI: 10.1038/s41598-025-23640-5

PB  - Springer Science and Business Media LLC

VL  - 15

IS  - 1

Y2  - 2025/12/03

ER  -