@inproceedings{inproceedings, title  = {{3D determination of a MOSFET gate morphology by FIB tomography}},

 url = {{}},

 year = {{2018}},

 month = {{1}},

 author = {{Inkson BJ and Olsen S and Norris DJ and O'Neill AG and Mobus G}},

 journal = {{MICROSCOPY OF SEMICONDUCTING MATERIALS 2003}},

 issue = {{180}},

 pages = {{611-616}},

 note = {{Accessed on 2026/07/21}}}