TY  - CONF

T1  - 3D determination of a MOSFET gate morphology by FIB tomography

JO  - MICROSCOPY OF SEMICONDUCTING MATERIALS 2003

PY  - 2018/01/10

AU  - Inkson BJ

AU  - Olsen S

AU  - Norris DJ

AU  - O'Neill AG

AU  - Mobus G

ED  - Cullis AG

ED  - Midgley PA

IS  - 180

SP  - 611

EP  - 616

Y2  - 2026/07/21

ER  -