@article{article, title  = {{Performance of ZnO TFTs with AlN as Insulator}},

 publisher = {{Springer Science and Business Media LLC}},

 url = {{https://doi.org/10.1557/proc-1035-l12-12 }},

 year = {{2011}},

 month = {{2}},

 author = {{De Souza MM and Cross RB and Jejurikar S and Adhi KP}},

 doi = {{10.1557/proc-1035-l12-12}},

 volume = {{1035}},

 journal = {{MRS Proceedings}},

 note = {{Accessed on 2025/12/07}}}