@article{article, title  = {{Atomic plane misorientation assisted crystalline quality improvement in epitaxial growth of AlN on a nanopatterned sapphire (0001) surface for deep ultraviolet photoelectric devices}},

 publisher = {{American Chemical Society (ACS)}},

 url = {{https://eprints.whiterose.ac.uk/id/eprint/200474 }},

 year = {{2023}},

 month = {{3}},

 author = {{Deng Y and Xie N and Hu W and Ma Z and Xu F and Chen L and Qiu W and Zhao L and Tao H and Wu B and Huang Y et al}},

 doi = {{10.1021/acsanm.2c05372}},

 volume = {{6}},

 journal = {{ACS Applied Nano Materials}},

 issue = {{6}},

 pages = {{4262-4270}},

 note = {{Accessed on 2025/12/01}}}