@inproceedings{inproceedings, title  = {{Potential and limits of scatterometry: A study on bowed profiles and high aspect ratios}},

 url = {{}},

 year = {{2004}},

 month = {{5}},

 author = {{Reinig P and Dost R and Moert M and Hingst T and Mantz U and Schuster T and Kerwien N and Kaufmann J and Osten W}},

 note = {{Accessed on 2026/07/14}}}