@article{article, title  = {{Fabrication of Step-and-Flash Imprint Lithography (S-FIL) templates using XeF2 enhanced focused ion-beam etching}},

 publisher = {{Springer Science and Business Media LLC}},

 url = {{https://doi.org/10.1007/s00339-009-5319-7 }},

 year = {{2009}},

 month = {{7}},

 author = {{Kettle J and Hoyle RT and Dimov S}},

 doi = {{10.1007/s00339-009-5319-7}},

 volume = {{96}},

 journal = {{Applied Physics A}},

 issue = {{4}},

 pages = {{819-825}},

 note = {{Accessed on 2026/09/13}}}