@inproceedings{inproceedings, title  = {{The effect of focused ion beam machining on residual stress and crack morphologies in alumina}},

 url = {{}},

 year = {{2006}},

 month = {{2}},

 author = {{Inkson BJ and Leclere D and Elfallagh F and Derby B}},

 doi = {{10.1088/1742-6596/26/1/052}},

 volume = {{26}},

 journal = {{EMAG-NANO 2005: Imaging, Analysis and Fabrication on the Nanoscale}},

 pages = {{219-222}},

 note = {{Accessed on 2026/07/22}}}