TY - CONF T1 - The effect of focused ion beam machining on residual stress and crack morphologies in alumina JO - EMAG-NANO 2005: Imaging, Analysis and Fabrication on the Nanoscale PY - 2006/02/27 AU - Inkson BJ AU - Leclere D AU - Elfallagh F AU - Derby B ED - Brown PD ED - Baker R ED - Hamilton B DO - DOI: 10.1088/1742-6596/26/1/052 VL - 26 SP - 219 EP - 222 Y2 - 2026/07/22 ER -