@article{article, title = {{Recent improvements in quantification of energy-dispersive X-ray spectra and maps in electron microscopy of semiconductors}}, publisher = {{Wiley}}, url = {{https://eprints.whiterose.ac.uk/id/eprint/215066 }}, year = {{2024}}, month = {{7}}, author = {{Walther T}}, doi = {{10.1002/appl.202300128}}, volume = {{3}}, journal = {{Applied Research}}, issue = {{6}}, note = {{Accessed on 2025/12/01}}}