TY  - JOUR

T1  - Recent improvements in quantification of energy-dispersive X-ray spectra and maps in electron microscopy of semiconductors

JO  - Applied Research

UR  - https://eprints.whiterose.ac.uk/id/eprint/215066

PY  - 2024/07/30

AU  - Walther T

ED  - 

DO  - DOI: 10.1002/appl.202300128

PB  - Wiley

VL  - 3

IS  - 6

Y2  - 2025/12/01

ER  -