TY  - JOUR

T1  - Electron microscopic study of sputter-deposited Ir films

JO  - Journal of Materials Science

UR  - https://doi.org/10.1023/b:jmsc.0000043589.23138.b6

PY  - 2004/10/15

AU  - Echigoya J

AU  - Mumtaz K

AU  - Hayasaka Y

AU  - Aoyagi E

ED  - 

DO  - DOI: 10.1023/b:jmsc.0000043589.23138.b6

PB  - Springer Science and Business Media LLC

VL  - 39

IS  - 20

SP  - 6215

EP  - 6219

Y2  - 2026/08/20

ER  -