@article{article, title  = {{In-situ full-wafer metrology via coupled white light and monochromatic stroboscopic illumination}},

 publisher = {{Elsevier BV}},

 url = {{https://eprints.whiterose.ac.uk/id/eprint/224533 }},

 year = {{2024}},

 month = {{11}},

 author = {{Atkinson JBP and Howse JR}},

 doi = {{10.1016/j.optlaseng.2024.108692}},

 volume = {{184}},

 journal = {{Optics and Lasers in Engineering}},

 issue = {{Part 2}},

 note = {{Accessed on 2025/11/01}}}