@article{article, title  = {{Nanowear in scanning force microscopy: Information on deposits formed in and downstream of a hexane plasma}},

 publisher = {{AIP Publishing}},

 url = {{https://doi.org/10.1063/1.1446220 }},

 year = {{2002}},

 month = {{3}},

 author = {{Dinelli F and Leggett GJ and Alexander MR}},

 doi = {{10.1063/1.1446220}},

 volume = {{91}},

 journal = {{Journal of Applied Physics}},

 issue = {{6}},

 pages = {{3841-3846}},

 note = {{Accessed on 2025/11/28}}}